• silicon
• inertial sensor
• mems
• gyroscope

In this thesis, carried out in collaboration with Hanking Electronics, the design
of an innovative bulk MEMS gyroscope is presented. To begin with, the state
of the art is discussed, with focus on MEMS manufacturing technology and
bulk gyroscopes’ working principle. Then, a theoretical model, that allows to
fully describe the behavior of a bulk MEMS gyroscope from both the mechanical
and the electrical point of view, is developed. Based on this model, the design
parameters that mostly affect the gyroscope’s performances are identified and
an innovative geometry for a bulk gyroscope is developed. In conclusion, the
process that leads to the complete definition of the new device is explained in
detail and its performances are compared with those of a traditional lumped
gyroscope designed at Hanking Electronics.