ETD

• gyroscope
• mems
• sensor

The purpose of the present work is to analyse the behaviour of an existing MEMS gyroscope when subjected to strong overloads due to shocks and drops. The simplest FEM models (“equivalent” static load simulations) have been compared to more refined models (implicit and explicit dynamic simulations) and with a MATLAB implementation of the modal reduction technique, in order to develop a simulation flow which is both effective and efficient. The outcome includes redesign proposals which improve the sensor behaviour during shocks.