• MEMS
• Piezoresistive
• Pressure
• Sensor
• Silicon

The object of the study are piezoresistive MEMS pressure sensors. In the work there is a description of main MEMS pressure sensor models, with carefully about piezoresistive pressure sensors. There is a description of piezoresistive effect. Main MEMS fabrication technologies are illustrated. The main goal of this thesis is the realization of a new piezoresistive MEMS pressure sensor design that allows to reduce thermal induced effects and substrate deformations effects. Simulations and analysis have been done in order to obtain the sought after results. The used model, scripts and results are represented in this work.