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Tesi etd-04212012-164724


Thesis type
Tesi di dottorato di ricerca
Author
RUSSINO, VINCENZO
URN
etd-04212012-164724
Title
CMOS-compatible MEMS processes and their application to the development of biosensors
Settore scientifico disciplinare
ING-INF/01
Corso di studi
INGEGNERIA DELL'INFORMAZIONE
Commissione
tutor Prof. Nannini, Andrea
tutor Ing. Pieri, Francesco
Parole chiave
  • suspended microstructures
  • resonant sensors
  • oscillator
  • microfabrication
  • microbalances
  • magnetic actuation
  • bio-MEMS
  • Anisotropic silicon etching
Data inizio appello
05/06/2012;
Consultabilità
completa
Riassunto analitico
The research activity developed during my Ph.D. program was focused on CMOS-compatible MEMS (Micro-Electro-Mechanical System) processes and their application to the development of biosensors.<br><br>A first activity has been oriented towards the development of a technique to reduce the etching times and increase the freedom in the design of large suspended microstructures fabricated by bulk anisotropic etching of silicon. This goal was obtained by pre-patterning of the membrane with periodic convex-corner patterns. Different periodic patterns are proposed and analyzed, experimental release times for dielectric membranes are presented.<br><br>The second activity research was focused on the design and fabrication improvement of a magnetically actuated microbalance for biosensing application. A CMOS-compatible protocol for covalent bonding of organo-functional silanes (to be used as link sites for biomolecular probes) on the microbalance surface was developed. The functionality of the device as a gravimetric sensor was verified. Moreover, a single chip integrated electronic oscillator based on the MEMS resonator was designed. A first prototype of circuit was implemented and characterized.
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