• accelerometer
• automatic test procedure
• gyroscope
• inertial sensor
• MEMS inertial measurement units
• test algorithm

Microelectronic companies usually need an end product testing step. A product test returns informations about its effective working, and feedback to other production steps, such as design or manufacturing. For micro-electro-mechanical systems (MEMS) testing procedures testing becomes particularly relevant, because of specific features, e.g. manufacturing process steps and mechanical system parameters.
This report is the result of a project about testing procedures design, carried out in Itzehoe, at Fraunhofer-ISIT institute, on behalf of SensoDynamics company.
The test algorithm was implemented on a LabVIEW platform. It was designed for a wafer-sort system, but only tried on a single-chip probecard.
The algorithm provides tests of resonance frequency, Q-factor, capacitances
values and mismatch, QUAD-bias for accelerometers and gyroscopes, and it is configurable for multi-DOF inertial sensors, up to 6-dimensional IMU (inertial measurement units).