ETD

Archivio digitale delle tesi discusse presso l'Università di Pisa

Tesi etd-06192019-172340


Tipo di tesi
Tesi di laurea magistrale
Autore
SARDELLI, LEONARDO
URN
etd-06192019-172340
Titolo
Study and design optimization of a piezoresistive MEMS pressure sensor
Dipartimento
INGEGNERIA CIVILE E INDUSTRIALE
Corso di studi
INGEGNERIA MECCANICA
Relatori
relatore Prof. Beghini, Marco
correlatore Dott. Bertini, Lorenzo
correlatore Dott. Luschi, Luca
Parole chiave
  • Silicon
  • MEMS
  • Pressure
  • Piezoresistive
  • Sensor
Data inizio appello
10/07/2019
Consultabilità
Non consultabile
Data di rilascio
10/07/2089
Riassunto
The object of the study are piezoresistive MEMS pressure sensors. In the work there is a description of main MEMS pressure sensor models, with carefully about piezoresistive pressure sensors. There is a description of piezoresistive effect. Main MEMS fabrication technologies are illustrated. The main goal of this thesis is the realization of a new piezoresistive MEMS pressure sensor design that allows to reduce thermal induced effects and substrate deformations effects. Simulations and analysis have been done in order to obtain the sought after results. The used model, scripts and results are represented in this work.
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